鹽酸 | |||
項目 | 單位 | UP級規格 | EL級規格 |
含量 | % | 36.0~38.0 | 36.0~38.0 |
色度 | 黑曾 | ≤5 | ≤5 |
灼燒殘渣(以硫酸鹽計) | ppm | ----- | ----- |
顆粒(≥0.5um) | 個/ml | ≤25 | ----- |
顆粒(≥0.3um) | 個/ml | ≤150 | ----- |
顆粒(≥0.2um) | 個/ml | ≤300 | ----- |
顆粒(≥1.0um) | 個/ml | ---- | ≤25 |
亞硫酸鹽(SO3) | ppm | ≤0.8 | ≤0.8 |
磷酸鹽(PO4) | ppm | ≤1 | ≤1 |
硫酸鹽(SO4) | ppm | ≤0.5 | ≤0.5 |
游離氯(Cl) | ppm | ≤0.5 | ≤0.5 |
鋁(Al) | ppb | ≤5 | ≤20 |
銻(Sb) | ppb | ≤5 | ≤10 |
砷(As) | ppb | ≤10 | ≤30 |
鋇(Ba) | ppb | ≤10 | ≤50 |
鈹(Be) | ppb | ≤10 | ≤10 |
鉍(Bi) | ppb | ≤10 | ≤20 |
硼(B) | ppb | ≤10 | ≤50 |
鎘(Cd) | ppb | ≤10 | ≤50 |
鈣(Ca) | ppb | ≤10 | ≤50 |
鉻(Cr) | ppb | ≤10 | ≤100 |
鈷(Co) | ppb | ≤10 | ≤20 |
銅(Cu) | ppb | ≤10 | ≤20 |
鎵(Ga) | ppb | ≤10 | |
鍺(Ge) | ppb | ≤10 | ---- |
金(Au) | ppb | ≤5 | ≤100 |
鐵(Fe) | ppb | ≤50 | ≤100 |
鉛(Pb) | ppb | ≤10 | ≤50 |
鋰(Li) | ppb | ≤10 | ---- |
鎂(Mg) | ppb | ≤10 | ≤100 |
錳(Mn) | ppb | ≤10 | ≤20 |
鉬(Mo) | ppb | ≤10 | ≤100 |
鎳(Ni) | ppb | ≤10 | ≤20 |
鈮(Nb) | ppb | ≤10 | ---- |
鉀(K) | ppb | ≤5 | ≤50 |
銀(Ag) | ppb | ≤5 | ≤20 |
鈉(Na) | ppb | ≤10 | ≤100 |
鍶(Sr) | ppb | ≤10 | ---- |
鉭(Ta) | ppb | ≤10 | ---- |
鉈(Tl) | ppb | ≤10 | ---- |
鈦(Ti) | ppb | ≤10 | ≤100 |
錫(Sn) | ppb | ≤10 | ≤100 |
釩(V) | ppb | ≤10 | ---- |
鋅(Zn) | ppb | ≤10 | ≤20 |
鋯(Zr) | ppb | ≤10 | ---- |